사업단 구성

참여교수

임상우교수님 사진

학위 degrees

B.S., 연세대학교, 1992
M.S., 연세 대학교, 1995
Ph.D., University of Tokyo (동경대학), 1998

교수과목 lecture

학부 : 열전달, 반도체공정개론
대학원 : 무기재료특강, 나노재료공정

연락처 contact

전화 : +82-2-2123-5754
팩스 : 02-312-6401
E-mail : swlim@yonsei.ac.kr
연구실 : http://web.yonsei.ac.kr/ndl

교수님 소개 introdution

임상우 교수님은 국비유학생으로 일본 동경대학에서 low dielectric constant plasma CVD 박막에 관한 연구로 1998년 박사학위를 받으셨다.

그 후 1998년 4월부터 2001년 3월까지 Stanford University, Dept. of Electrical Engineering과 Dept. of Chemistry에서 postdoc research associate로 재직하시면서 NSF/SRC Center for Environmentally Benign Semiconductor Manufacturing의 연구원으로서 각종 친환경적인 반도체공정의 연구개발을 수행하셨다.

그 후, 2001년 4월부터 2005년 7월까지 미국 Motorola사에 Principal Staff Scientist (책임연구원)으로 재직하시면서 차세대 CMOS transistor의 제작에 관련된 각종 표면에칭과 게이트절연막에 관한 팀을 이끄시며 이에 관한 연구를 수행하셨다.

임상우 교수님의 연구분야는 반도체, 태양전지, 각종 나노소자 등이며, 이들의 제작에 있어서 다양한 화학반응공정을 체계적으로 분석하고, 소자를 구성하는 재료의 특성을 파악하여, 최적의 성능을 실현할 미세소자를 제작하는 것을 연구컨셉으로 한다. 그리고, 다양한 전자소자의 제작공정, 재료, 소자의 상관관계를 유기적으로 파악하는 것을 연구목표로 한다.

연구분야 research field

Semiconductor Fabrication

Solar Cell

Nano Device Fabrication

Surface Chemistry and Analysis

주요논문 papers

1. Younghwan Lee, Kibyung Park, and Sangwoo Lim*, “Oxidation of Hydrogen Terminated Ge(100) Surface in the Presence of Iodine in Methanol”, Appl. Surf. Sci., 255, 3316-3319 (2008).

2. Huihu Wang, Jonghyuck Lee, Seonghoon Baek and Sangwoo Lim*, “High photocatalytic activity of silver-loaded ZnO-SnO2 coupled catalysts”, Chem. Eng. J., accepted, June 20, 2008. (in press)

3. Jonghyuck Lee, Kibyung Park, and Sangwoo Lim*, “Effect of HAc and IPA Addition in Ozonated Water Cleaning System for ArF Photoresist Removal”, J. Electrochem. Soc., 155, D547-D550 (2008).

4. Won Bae Lim, Viswanathan S. Saji, Yong Soo Cho?, Yong Gun Shul, Sangwoo Lim, Jae Hyuk Jang and Hong Ryul Lee, “Crystallization and dielectric properties of low temperature dielectrics containing Li2O filler”, J. Non-Crystalline Solids, 354, 3849-3853 (2008).

5. Jahyun Yang, Jaejin Song, Seonghoon Baek and Sangwoo Lim*, “Effect of Surface Preparation on the Morphology of ZnO Nanorods”, Physica B., 403, 3034?3039 (2008).

6. Younghwan Lee, Kibyung Park, Yong Soo Cho and Sangwoo Lim*, “Effect of Ge Surface Termination on Oxidation Behavior”, Appl. Surf. Sci., 254, 7544?7548 (2008).

7. Jaejin Song, Seonghoon Baek, Jongwoo Kim, Heon Lee and Sangwoo Lim*, “Selective ZnO Nanowires Growth Using Nano-Imprint Technology”, Journal of Nanoscience and Nanotechnology, accepted Nov. 29, 2007. (in press)

8. Kibyung Park, Younghwan Lee, Jonghyuck Lee and Sangwoo Lim*, “Oxidation Mechanism of Hydrogen-terminated Ge(100) Surface”, Appl. Surf. Sci., 254, 4828-4832 (2008).

9. Jaejin Song, Seonghoon Baek and Sangwoo Lim*, “Effect of hydrothermal reaction conditions on the optical properties of ZnO nanorods”, Physica B, 403, 1960-1963 (2008).

10. Jaejin Song, Seonghoon Baek, Jonghyuck Lee and Sangwoo Lim*, “Role of OH- in the low temperature hydrothermal synthesis of ZnO nanorods”, J. Chem. Technol. Biot., 83, 345-350 (2008).

11. Huihu Wang, Seonghoon Baek, Jaejin Song, Jonghyuck Lee and Sangwoo Lim*, “Microstructural and optical characteristics of solution-grown Ga-doped ZnO nanorod arrays”, Nanotechnology, 19, 075607 (2008).

12. Yonughwan Lee, Jonghyuck Lee, Yonggun Shul and Sangwoo Lim*, “Effect of wafer resistivity and HF concentration on the formation of vertically aligned porous silicon”, J. Ind. Eng. Chem, 14, 1, 105-109 (2008).

13. Jonghyuck Lee, Kibyung Park and Sangwoo Lim*, “Improvement of Photoresist Removal Efficiency in Ozonated Water Cleaning System”, J. Ind. Eng. Chem, 14, 1, 100-104 (2008).

14. Kibyung Park , Younghwan Lee, Jonghyuck Lee and Sangwoo Lim*, “Modification of H-terminated Ge surface in hydrochloric acid”, Appl. Surf. Sci., 254, 6, 1842-1846 (2008).

15. Seonghoon Baek, Jaejin Song and Sangwoo Lim*, “Improvement of the optical properties of ZnO nanorods by Fe doping”, Physica B, 399, 2, 101-104 (2007).

16. Jaejin Song and Sangwoo Lim*, “Effect of Seed Layer on the Growth of ZnO Nanorods”, J. Phys. Chem. C, 111, 2, 596-600 (2007).

17. Sangwoo Lim*, Sandy Parsons and Tien-Ying Luo, “Effect of repetition of plasma nitride oxide integration”, Thin Solid Films, 515, 4, 2673-2677 (2006).

18. Sangwoo Lim, Seung Wan Kim, Hyun Jong Kim, Ji Eun Ahn, Hak Soo Han and Yong Gun Shul, “Effect of Operation Parameters on the Performance of Micro Direct Methanol Fuel Cell Fabricated on Printed Circuit Board”, J. Power Sources, 161, 1, 27-33 (2006).

19. Sangwoo Lim*, TienYing Luo and Jack Jiang, “Mechanism of Silicon Dioxide Decoupled Plasma Nitridation”, Jpn. J. Appl. Phys. Vol. 45, No.15, L413 - L415 (2006).

20. S. Rauf, S. W. Lim and P. L. G. Ventzek, “Model for Nitridation of Nanoscale SiO2 Thin Films in Pulsed Inductively Coupled N2 Plasma”, J. Appl. Phys. Vol. 98, No. 2, 024305 (2005).

21. SangWoo Lim and Brian Winstead, “Surface Preparation for Transistor Performance Improvement by Triple Gate Oxide Integration”, J. Electrochem. Soc., Vol. 152, No. 9, G714-G719 (2005).

22. SangWoo Lim, Daniel Tekleab, Tien-Ying Luo, and Paul Grudowski, “Optimization of Annealing Process of Pulsed RF Decoupled Plasma Nitridation Oxynitrides”, Jpn. J. Appl. Phys. Vol. 44, No. 19, L584-L586 (2005).

23. SangWoo Lim and Tien Ying Luo, “Behavior of Transconductance and Drive Current of Decoupled Plasma Nitridation Oxynitrides”, Jpn. J. Appl. Phys. Vol. 44, No. 6A, 3923-3925, (2005).

24. SangWoo Lim and Christopher E. D. Chidsey, “Role of O3 and OH Radicals in Ozonated Aqueous Solution for the Photoresist Removal of Semiconductor Fabrication”, Ozone Science and Eng., Vol. 27, No. 2, 139-146 (2005).
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